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Ion Implantation Technology - 94

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by S. Coffa
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Ion Implantation Technology - 94 by S. Coffa

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.

The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

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Ebook Details
Pages: 1030
Size: 211.8 MB
Publisher: North Holland
Date published:   1995
ISBN: 9780444599728 (DRM-PDF)

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Nonfiction > Science > Optics

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