The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.
The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.
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|Size: ||211.8 MB|
|Publisher: ||North Holland|
|Date published: || 1995|
|ISBN: ||9780444599728 (DRM-PDF)|
|Read Aloud: ||not allowed|