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Manufacturing Techniques for Microfabrication and Nanotechnology

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by Marc J. Madou
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Manufacturing Techniques for Microfabrication and Nanotechnology by Marc J. Madou

Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.

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Ebook Details
Pages: 670
Size: 141.4 MB
Publisher: CRC Press
Date published:   2011
ISBN: 9781439895306 (DRM-PDF)

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This product is listed in the following categories:

Nonfiction > Technology > Nanotechnology
Nonfiction > Technology > Manufacturing
Nonfiction > Technology > Electronics > Microelectronics

This author has products in the following categories:

Nonfiction > Technology > Nanotechnology
Nonfiction > Technology > Electronics > Microelectronics
Nonfiction > Technology > Material Science
Nonfiction > Technology > Manufacturing
Nonfiction > Science > Solid State Physics
Nonfiction > Science > Life Sciences > Biology > Marine Biology

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