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Science and Technology of Defects in Silicon

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by C. A. J. Ammerlaan
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Science and Technology of Defects in Silicon by C. A. J. Ammerlaan

This volume reviews recent developments in the materials science of silicon. The topics discussed range from the fundamental characterization of the physical properties to the assessment of materials for device applications, and include: crystal growth; process-induced defects; topography; hydrogenation of silicon; impurities; and complexes and interactions between impurities.

In view of its key position within the conference scope, several papers examine process induced defects: defects due to ion implantation, silicidation and dry etching, with emphasis being placed on the device aspects. Special attention is also paid to recent developments in characterization techniques on epitaxially grown silicon, and silicon-on-insulators.

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Ebook Details
Pages: 518
Size: 104.8 MB
Publisher: North Holland
Date published:   2014
ISBN: 9780080983646 (DRM-PDF)

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This product is listed in the following categories:

Nonfiction > Science > Physics
Nonfiction > Technology > Electronics > Microelectronics
Nonfiction > Technology > Material Science

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